Substrate processing apparatus and substrate processing method

ABSTRACT

In a substrate processing apparatus, an outer edge portion of a substrate in a horizontal state is supported from below by an annular substrate supporting part, and a lower surface facing part having a facing surface facing a lower surface of the substrate is provided inside the substrate supporting part. A gas ejection nozzle for ejecting heated gas toward the lower surface is provided in the lower surface facing part, and the substrate is heated by the heated gas when an upper surface of the rotating substrate is processed with a processing liquid ejected from an upper nozzle. Further, a lower nozzle is provided in the lower surface facing part, to thereby perform a processing on the lower surface with a processing liquid. Since the gas ejection nozzle protrudes from the facing surface, a flow of the processing liquid into the gas ejection nozzle can be suppressed during the processing.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No.15/256,052, filed Sep. 2, 2016, which in turn is a divisional of U.S.application Ser. No. 14/178,887, filed Feb. 12, 2014, now abandoned,which claims the benefit of Japanese Patent Application Nos.2013-026224, filed Feb. 14, 2013 and JP 2013-027387, filed Feb. 15,2013, which are incorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a substrate processing apparatus and asubstrate processing method.

BACKGROUND ART

In a process of manufacturing a semiconductor substrate (hereinafter,referred to simply as a “substrate”), conventionally, variousprocessings are performed on a substrate by using a substrate processingapparatus. Japanese Patent Application Laid-Open No. 2004-158588(Document 1), for example, discloses a substrate processing apparatuscapable of removing organic substances deposited on a substrate by usinga removal liquid. In the substrate processing apparatus, by supplyingtemperature-controlled nitrogen gas onto a back surface of the substratefrom a back-surface side gas nozzle before supplying the removal liquidonto the substrate from a removal liquid nozzle, a temperature of thesubstrate becomes close to that of the removal liquid. It is therebypossible to make the temperature of the removal liquid flowing on asurface of the substrate almost uniform on the entire surface of thesubstrate and improve the inplane uniformity of the processing ofremoving the organic substances.

In another example, by supplying a chemical liquid onto a substratehaving a surface on which a resist pattern is formed, a processing suchas etching or the like is performed on the surface of the substrate.Further, Japanese Patent Application Laid-Open No. 2002-305177 (Document2) discloses a substrate processing apparatus for processing a substratehaving a surface on which a thin film formed thereon is patterned by dryetching with a resist film as a mask, and the substrate processingapparatus is capable of removing reaction products formed on the surfaceof the substrate by using a removal liquid. In the substrate processingapparatus of Document 2, a cup for capturing the removal liquidscattered from the substrate being rotated is provided, and by reducingthe exhaust of atmosphere in the cup in removing the reaction productswith the removal liquid, it is possible to effectively preventdeterioration in the removal capability for the reaction products due tovaporization of water from the removal liquid, or the like.

In the substrate processing apparatus of Document 1, which includes avacuum chuck having an adsorption surface and holds the substrate byadsorption with the vacuum chuck, it is impossible to perform anyprocessing onto an entire lower surface of the substrate by using aprocessing liquid. Further, in a configuration in which a gas ejectionnozzle facing the lower surface of the substrate is provided and aprocessing liquid is supplied onto the lower surface, in order toprevent any failure of the gas ejection nozzle due to a flow of theprocessing liquid into the gas ejection nozzle, required is a techniquefor suppressing the flow of the processing liquid into the gas ejectionnozzle.

On the other hand, in the apparatus in which a processing is performedin the cup, like in Document 2, if gas containing a chemical liquidcomponent is diffused out of the cup, there is a possible that the gasmay have some effect on devices and the like disposed around the cup,and accordingly it is absolutely necessary to exhaust the atmosphere inthe cup. Therefore, there is a limitation in suppressing thevaporization of the chemical liquid by reducing the exhaust. Actually,since there occurs a decrease in the temperature especially at an outeredge portion of the substrate, it is impossible to improve theuniformity of the processing using the chemical liquid.

SUMMARY OF INVENTION

The present invention is intended for a substrate processing apparatusfor processing a substrate, and in a substrate processing apparatus inwhich an upper surface of a substrate is processed with a processingliquid while the substrate is heated with heated gas ejected from a gasejection nozzle, it is an object of the present invention to perform aprocessing onto a lower surface of the substrate with a processingliquid and further to suppress a flow of the processing liquid into thegas ejection nozzle during the processing. It is another object of thepresent invention to perform uniform processing onto the upper surfaceof the substrate.

The substrate processing apparatus according to one aspect of thepresent invention includes an annular supporting part having an annularshape around a central axis directed in a vertical direction, forsupporting an outer edge portion of a substrate in a horizontal statefrom below, a lower surface facing part having a facing surface whichfaces a lower surface of the substrate inside the annular supportingpart, a rotating mechanism for rotating the annular supporting parttogether with the substrate around the central axis relatively to thelower surface facing part, a first processing liquid supply part forsupplying a first processing liquid onto an upper surface of thesubstrate, a second processing liquid supply part for supplying a secondprocessing liquid onto the lower surface of the substrate from aprocessing liquid nozzle provided at the lower surface facing part, andat least one gas ejection nozzle protruding from the facing surface, forejecting heated gas toward the lower surface of the substrate. By thepresent invention, in the substrate processing apparatus in which theupper surface of the substrate is processed with the first processingliquid while the substrate is heated with heated gas ejected from thegas ejection nozzle, it is possible to perform a processing onto thelower surface of the substrate with the second processing liquid andfurther to suppress a flow of the second processing liquid into the gasejection nozzle during the processing.

Preferably, the facing surface is a sloped surface which gets fartheraway from the substrate as a distance from the central axis becomeslarger. It is thereby possible to easily guide the second processingliquid toward the outer side of the facing surface. Further, the atleast one gas ejection nozzle includes a plurality of gas ejectionnozzles, and a distance between an ejection port of one gas ejectionnozzle out of the plurality of gas ejection nozzles and the central axismay be different from that between an ejection port of another gasejection nozzle and the central axis. It is thereby possible to heat awide range of the substrate.

The substrate processing apparatus according to another aspect of thepresent invention includes a sealed space forming part forming aninternal space which is sealed, a sealed space opening and closingmechanism for moving a movable part which is part of the sealed spaceforming part relatively to the other portion, to thereby open and closethe sealed space forming part, a substrate holding part disposed in thesealed space forming part, for holding a substrate in a horizontalstate, a chemical liquid supply part for supplying a chemical liquidonto an upper surface of the substrate, an inert gas supply part forsupplying an inert gas into the internal space, a gas exhaust part forexhausting gas from the internal space, and a control part forcontrolling the inert gas supply part to supply the inert gas into theinternal space while controlling the gas exhaust part to exhaust gasfrom the internal space, to thereby bring the internal space which issealed into an inert gas filled state, and for stopping supply of theinert gas into the internal space and exhaust of gas from the internalspace when controlling the chemical liquid supply part to supply thechemical liquid onto the substrate in the inert gas filled state. By thesubstrate processing apparatus, it is possible to perform uniformprocessing onto the upper surface of the substrate.

Preferably, the substrate processing apparatus further includes a topplate extending along the upper surface so as to cover the substrateabove the substrate, which goes close to the upper surface when thechemical liquid supply part supplies the chemical liquid onto thesubstrate, and a nozzle for supplying the chemical liquid from thechemical liquid supply part to between the top plate and the uppersurface. It is thereby possible to perform more uniform processing ontothe upper surface of the substrate.

Further, the control part may stop supply of the inert gas into theinternal space and exhaust of gas from the internal space beforestarting supply of the chemical liquid onto substrate. It is therebypossible to more reliably block the flow of gas into/out of the internalspace when the supply of the chemical liquid onto the substrate isstarted.

The present invention is also intended for a substrate processing methodof processing a substrate in a substrate processing apparatus. In thesubstrate processing method according to the present invention, thesubstrate processing apparatus includes a sealed space forming partforming an internal space which is sealed, a sealed space opening andclosing mechanism for moving a movable part which is part of the sealedspace forming part relatively to the other portion, to thereby open andclose the sealed space forming part, a substrate holding part disposedin the sealed space forming part, for holding a substrate in ahorizontal state, a chemical liquid supply part for supplying a chemicalliquid onto an upper surface of the substrate, an inert gas supply partfor supplying an inert gas into the internal space, and a gas exhaustpart for exhausting gas from the internal space, and the substrateprocessing method includes a) supplying the inert gas into the internalspace by the inert gas supply part while exhausting gas from theinternal space by the gas exhaust part, to thereby bring the internalspace which is sealed into an inert gas filled state, and b) supplyingthe chemical liquid onto the substrate in the inert gas filled state bythe chemical liquid supply part, and in the substrate processing method,supply of the inert gas into the internal space and exhaust of gas fromthe internal space are stopped when the chemical liquid is supplied ontothe substrate in the operation b).

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view showing a substrate processingapparatus in accordance with a first preferred embodiment;

FIG. 2 is a block diagram showing a gas-liquid supply part and agas-liquid exhaust part;

FIGS. 3 and 4 are cross-sectional views each showing part of thesubstrate processing apparatus;

FIG. 5 is a view showing an arrangement of gas ejection nozzles in alower surface facing part;

FIG. 6 is a flowchart showing an operation flow of the substrateprocessing apparatus;

FIG. 7 is a graph showing an experimental result on etching;

FIG. 8 is a view showing another exemplary arrangement of the gasejection nozzles in the lower surface facing part;

FIG. 9 is a view showing still another exemplary arrangement of the gasejection nozzles in the lower surface facing part;

FIG. 10 is a cross-sectional view showing a substrate processingapparatus in accordance with a second preferred embodiment;

FIG. 11 is a block diagram showing a processing liquid supply part, aninert gas supply part, and a gas-liquid exhaust part;

FIGS. 12 and 13 are cross-sectional views each showing part of thesubstrate processing apparatus;

FIG. 14 is a flowchart showing an operation flow of the substrateprocessing apparatus;

FIG. 15 is a timing chart showing operation timings of constituentelements in the substrate processing apparatus; and

FIG. 16 is a graph showing an experimental result on etching.

DESCRIPTION OF EMBODIMENTS

FIG. 1 is a cross-sectional view showing a substrate processingapparatus 1 in accordance with the first preferred embodiment of thepresent invention. The substrate processing apparatus 1 is asingle-substrate processing apparatus for supplying a processing liquidto a semiconductor substrate 9 (hereinafter, referred to simply as a“substrate 9”) having a substantially disk-like shape, to therebyprocess substrates 9 one by one. In FIG. 1, hatching of the crosssections of some constituent elements in the substrate processingapparatus 1 is omitted (the same applies to other cross-sectionalviews).

The substrate processing apparatus 1 includes a chamber 12, a top plate123, a chamber opening and closing mechanism 131, a substrate holdingpart 14, a substrate rotating mechanism 15, a liquid receiving part 16,and a cover 17.

The chamber 12 includes a chamber body 121 and a chamber cover 122. Thechamber body 121 and the chamber cover 122 are each formed of anon-magnetic material. The chamber body 121 includes a chamber bottom210 and a chamber sidewall 214. The chamber bottom 210 includes a centerportion 211 having a substantially disk-like shape, an inner sidewall212 having a cylindrical shape extending downward from an outer edgeportion of the center portion 211, and a base part 213 extending fromthe inner sidewall 212 outward in a radial direction. The chambersidewall 214 has an annular shape around a central axis J1 directed in avertical direction, protruding upward from a middle portion of the basepart 213 in the radial direction. A member forming the chamber sidewall214 also serves as part of the liquid receiving part 16, as describedlater. In the following description, a space surrounded by the chambersidewall 214, the inner sidewall 212, and the base part 213 is referredto as a lower annular space 217. When the substrate 9 is supported by asubstrate supporting part 141 (described later) of the substrate holdingpart 14, a lower surface 92 of the substrate 9 faces an upper surface211 a of the center portion 211. In the following description, thecenter portion 211 of the chamber bottom 210 is referred to as a “lowersurface facing part 211”, and the upper surface 211 a of the centerportion 211 is referred to as a “facing surface 211 a”. The detail ofthe lower surface facing part 211 will be described.

The chamber cover 122 has a substantially disk-like shape perpendicularto the central axis J1, including an upper portion of the chamber 12.The chamber cover 122 closes an upper opening of the chamber body 121.FIG. 1 shows a state where the chamber cover 122 is separated from thechamber body 121. When the chamber cover 122 closes the upper opening ofthe chamber body 121, an outer edge portion of the chamber cover 122comes into contact with an upper portion of the chamber sidewall 214.

The chamber opening and closing mechanism 131 moves the chamber cover122 which is a movable part of the chamber 12 relatively to the chamberbody 121 which is the other portion of the chamber 12 in the verticaldirection. The chamber opening and closing mechanism 131 serves as acover up-and-down moving mechanism for moving the chamber cover 122 upand down. When the chamber opening and closing mechanism 131 moves thechamber cover 122 in the vertical direction, the top plate 123 is alsomoved, together with the chamber cover 122, in a certain range in thevertical direction. When the chamber cover 122 comes into contact withthe chamber body 121 to close the upper opening thereof and the chambercover 122 is pressed toward the chamber body 121, an internal space (seeFIG. 4 described later) which is sealed is formed inside the chamber 12.

The substrate holding part 14 is disposed in the chamber 12 and holdsthe substrate 9 in a horizontal state. In other words, the substrate 9is held by the substrate holding part 14, in a state where an uppersurface 91 thereof is directed upward, being perpendicular to thecentral axis J1. The substrate holding part 14 includes theabove-described substrate supporting part 141 for supporting an outeredge portion of the substrate 9 from below and a substrate retainingpart 142 for retaining the outer edge portion of the substrate 9 fromabove, which is supported by the substrate supporting part 141. Thesubstrate supporting part 141 includes a supporting part base 413 havinga substantially annular disk-like shape around the central axis J1 and aplurality of first contact parts 411 fixed to an upper surface of thesupporting part base 413. The substrate retaining part 142 includes aplurality of second contact parts 421 fixed to a lower surface of thetop plate 123. Positions of the plurality of second contact parts 421 ina circumferential direction are actually different from those of theplurality of first contact parts 411 in the circumferential direction.

The top plate 123 has a substantially disk-like shape perpendicular tothe central axis J1. The top plate 123 is disposed below the chambercover 122 and above the substrate supporting part 141. The top plate 123has an opening at its center portion. When the substrate 9 is supportedby the substrate supporting part 141, the upper surface 91 of thesubstrate 9 faces the lower surface of the top plate 123 which isperpendicular to the central axis J1. A diameter of the top plate 123 islarger than that of the substrate 9, and an outer edge portion of thetop plate 123 is positioned outer than the outer edge portion of thesubstrate 9 in the radial direction all around the circumference.

In the state of FIG. 1, the top plate 123 is supported by the chambercover 122. In more detail, on a lower surface of the chamber cover 122,a plate holding part 222 having an annular shape is provided. The plateholding part 222 includes a cylindrical portion 223 having asubstantially cylindrical shape around the central axis J1 and a flangeportion 224 having a substantially annular shape around the central axisJ1. The cylindrical portion 223 extends downward from the lower surfaceof the chamber cover 122. The flange portion 224 extends from a lowerend of the cylindrical portion 223 outward in the radial direction.

The top plate 123 includes a held part 237 having an annular shape. Theheld part 237 includes a cylindrical portion 238 having a substantiallycylindrical shape around the central axis J1 and a flange portion 239having a substantially annular shape around the central axis J1. Thecylindrical portion 238 extends upward from an upper surface of the topplate 123. The flange portion 239 extends from an upper end of thecylindrical portion 238 inward in the radial direction. The cylindricalportion 238 is positioned outer than the cylindrical portion 223 of theplate holding part 222 in the radial direction and faces the cylindricalportion 223 in the radial direction. The flange portion 239 ispositioned above the flange portion 224 of the plate holding part 222and faces the flange portion 224 in the vertical direction. When a lowersurface of the flange portion 239 of the held part 237 comes intocontact with an upper surface of the flange portion 224 of the plateholding part 222, the top plate 123 is attached to the chamber cover122, being suspended from the chamber cover 122.

The substrate rotating mechanism 15 of FIG. 1 is a so-called hollowmotor. The substrate rotating mechanism 15 includes a stator part 151having an annular shape around the central axis J1 and a rotor part 152having an annular shape. The rotor part 152 includes a permanent magnethaving a substantially annular shape. A surface of the permanent magnetis molded of a PTFE (polytetrafluoroethylene) resin. The rotor part 152is disposed inside the lower annular space 217 in the internal space ofthe chamber 12. Above the rotor part 152, attached is the supportingpart base 413 of the substrate supporting part 141 with a connectingmember interposed therebetween. The supporting part base 413 is disposedabove the rotor part 152.

The stator part 151 is disposed in the periphery of the rotor part 152outside the chamber 12 (in other words, outside the internal space),i.e., disposed outer in the radial direction. In the present preferredembodiment, the stator part 151 is fixed to the base part 213 andpositioned below the liquid receiving part 16. The stator part 151includes a plurality of coils arranged in the circumferential directionaround the central axis J1.

By supplying current to the stator part 151, a rotating force isgenerated around the central axis J1 between the stator part 151 and therotor part 152. The rotor part 152 is thereby rotated in a horizontalstate around the central axis J1. With a magnetic force exerted betweenthe stator part 151 and the rotor part 152, the rotor part 152 floats inthe chamber 12, not being in direct or indirect contact with the chamber12, and rotates the substrate 9, being in a floating state, togetherwith the substrate supporting part 141 around the central axis J1.

The liquid receiving part 16 includes a cup part 161 and a cup movingmechanism 162. As described earlier, part of the member forming thechamber sidewall 214 is included in the liquid receiving part 16. Thecup part 161 has an annular shape around the central axis J1 and ispositioned outer than the chamber sidewall 214 in the radial direction.The cup moving mechanism 162 moves the cup part 161 in the verticaldirection.

A lower portion of the cup part 161 is positioned inside a liquidreceiving recessed portion 165 which has an annular shape and ispositioned outer than the chamber sidewall 214. At an upper end portionof an outer wall 168 having a substantially cylindrical shapesurrounding an outer periphery of the liquid receiving recessed portion165, an outer seal part 169 having a substantially annular disk-likeshape around the central axis J1 is fixed. The outer seal part 169extends from the upper end portion of the outer wall 168 inward in theradial direction, to cover an outer peripheral portion of an upperopening of the liquid receiving recessed portion 165 all around thecircumference.

An upper nozzle 181 is fixed to a center portion of the chamber cover122. The upper nozzle 181 is insertable into the opening of the centerportion of the top plate 123. At a center portion of the lower surfacefacing part 211 of the chamber bottom 210, a lower nozzle 182 isattached. At the lower surface facing part 211, a plurality of gasejection nozzles 180 are further attached. A bottom portion of theliquid receiving recessed portion 165 is connected to a first exhaustpath 191. A bottom portion of the lower annular space 217 between theinner sidewall 212 and the chamber sidewall 214 is connected to a secondexhaust path 192. The positions for attachment of the upper nozzle 181and the lower nozzle 182 are not necessarily limited to the centerportion, but may be, for example, positions facing a peripheral portionof the substrate 9. Arrangement of the plurality of gas ejection nozzles180 will be described later.

FIG. 2 is a block diagram showing a gas-liquid supply part 18 and agas-liquid exhaust part 19 included in the substrate processingapparatus 1. The gas-liquid supply part 18 includes a chemical liquidsupply part 183, a deionized water supply part 184, an IPA supply part185, an inert gas supply part 186, and a heated gas supply part 187,besides the gas ejection nozzles 180, the upper nozzle 181, and thelower nozzle 182 described above. The chemical liquid supply part 183,the deionized water supply part 184, and the IPA supply part 185 areeach connected to the upper nozzle 181 with a valve interposedtherebetween. The lower nozzle 182 is connected to the deionized watersupply part 184 with a valve interposed therebetween. The upper nozzle181 is also connected to the inert gas supply part 186 with a valveinterposed therebetween. The upper nozzle 181 has a liquid ejection portat its center portion and has a gas ejection (jet) port therearound.Therefore, exactly, part of the upper nozzle 181 is part of a gas supplypart for supplying gas into the chamber 12 in a broad sense. The lowernozzle 182 has a liquid ejection port at its center portion. Theplurality of gas ejection nozzles 180 are connected to the heated gassupply part 187 with a valve interposed therebetween.

The first exhaust path 191 connected to the liquid receiving recessedportion 165 of the liquid receiving part 16 is connected to a gas-liquidseparating part 193. The gas-liquid separating part 193 is connected toan outer gas exhaust part 194, a chemical liquid collecting part 195,and a liquid exhaust (drain) part 196 each with a valve interposedtherebetween. The second exhaust path 192 connected to the chamberbottom 210 is connected to a gas-liquid separating part 197. Thegas-liquid separating part 197 is connected to an inner gas exhaust part198 and a liquid exhaust part 199 each with a valve interposedtherebetween. The constituent elements in the gas-liquid supply part 18and the gas-liquid exhaust part 19 are controlled by a control part 10.The chamber opening and closing mechanism 131, the substrate rotatingmechanism 15, and the cup moving mechanism 162 (see FIG. 1) are alsocontrolled by the control part 10.

In the present preferred embodiment, a chemical liquid supplied from thechemical liquid supply part 183 onto the substrate 9 through the uppernozzle 181 is an etching solution such as hydrofluoric acid, atetramethylammonium hydroxide solution, or the like. The deionized watersupply part 184 supplies deionized water (DIW) onto the substrate 9through the upper nozzle 181 or the lower nozzle 182. The IPA supplypart 185 supplies isopropyl alcohol (IPA) onto the substrate 9 throughthe upper nozzle 181. In the substrate processing apparatus 1, aprocessing liquid supply part for supplying any processing liquid otherthan the above processing liquids may be provided. Further, the inertgas supply part 186 supplies an inert gas into the chamber 12 throughthe upper nozzle 181. The heated gas supply part 187 supplies heated gas(e.g., a high-temperature inert gas heated up to 120 to 130 degrees C.)onto the lower surface 92 of the substrate 9 through the plurality ofgas ejection nozzles 180. In the present preferred embodiment, the gasused in the inert gas supply part 186 and the heated gas supply part 187is nitrogen gas (N₂), but any gas other than nitrogen gas may be used.In the case where the heated inert gas is used in the heated gas supplypart 187, the explosion-proof countermeasure in the substrate processingapparatus 1 can be simplified or is not needed.

As shown in FIG. 1, the cup part 161 includes a sidewall 611, an uppersurface part 612, and a lower surface part 613. The sidewall 611 has asubstantially cylindrical shape around the central axis J1. The uppersurface part 612 has a substantially annular disk-like shape around thecentral axis J1, extending from an upper end portion of the sidewall 611inward in the radial direction. The lower surface part 613 hassubstantially annular disk-like shape around the central axis J1,extending from a lower end portion of the sidewall 611 outward in theradial direction. The upper surface part 612 and the lower surface part613 are substantially perpendicular to the central axis J1. In the stateof FIG. 1, almost the whole of the sidewall 611 and the lower surfacepart 613 in the cup part 161 are positioned inside the liquid receivingrecessed portion 165.

On a lower surface of an outer edge portion of the chamber cover 122,provided are lip seals 231 and 232 each having an annular shape. The lipseal 231 is positioned above an upper end portion of the chambersidewall 214. The lip seal 232 is positioned above an inner edge portionof the upper surface part 612 of the cup part 161. When the chambercover 122 shown in FIG. 1 moves down and the cup part 161 moves up, asshown in FIG. 3, the lip seal 232 comes into contact with the inner edgeportion of the upper surface part 612 of the cup part 161 in thevertical direction. Further, when the chamber cover 122 moves down tothe chamber sidewall 214, as shown in FIG. 4, the lip seal 231 comesinto contact with the upper end portion of the chamber sidewall 214 inthe vertical direction.

As shown in FIG. 1, on a lower surface of an outer edge portion of thetop plate 123, a plurality of first engagement parts 241 are arranged inthe circumferential direction, and on an upper surface of the supportingpart base 413, a plurality of second engagement parts 242 are arrangedin the circumferential direction. It is preferable that these engagementparts should be provided in three or more pairs, and in the presentpreferred embodiment, four pairs are provided. At a lower portion of thefirst engagement part 241, provided is a recessed portion which isrecessed upward. The second engagement part 242 protrudes upward fromthe supporting part base 413.

When the chamber cover 122 moves down, as shown in FIGS. 3 and 4, thesecond engagement part 242 engages with the recessed portion of thefirst engagement part 241. The top plate 123 thereby engages with thesupporting part base 413 of the substrate supporting part 141 in thecircumferential direction around the central axis J1. In other words,the first engagement part 241 and the second engagement part 242 serveas a position regulating member for regulating a relative position ofthe top plate 123 with respect to the substrate supporting part 141 in arotation direction (for fixing the relative position in thecircumferential direction). When the chamber cover 122 moves down, thesubstrate rotating mechanism 15 controls a rotation position of thesupporting part base 413 so that the first engagement part 241 mayengage with the second engagement part 242. Further, in the states ofFIGS. 3 and 4, the plate holding part 222 releases holding of the topplate 123.

As described earlier, on the upper surface of the supporting part base413 shown in FIG. 1, the plurality of first contact parts 411 of thesubstrate supporting part 141 are arranged in the circumferentialdirection. The plurality of first contact parts 411 are disposed innerthan the plurality of second engagement parts 242 in the radialdirection. Further, on the lower surface of the outer edge portion ofthe top plate 123, the plurality of second contact parts 421 of thesubstrate retaining part 142 are arranged in the circumferentialdirection. The second contact parts 421 are disposed inner than theplurality of first engagement parts 241 in the radial direction. Asdescribed above, the positions of the plurality of second contact parts421 in the circumferential direction are different from those of theplurality of first contact parts 411 in the circumferential direction.In the present preferred embodiment, four first contact parts 411 arearranged at regular angular intervals in the circumferential direction.Further, in the circumferential direction, two second contact parts 421are disposed adjacently on both sides of each first contact part 411,and assuming that the two second contact parts 421 adjacent to one firstcontact part 411 are regarded as one pair, four pairs of second contactparts 421 are disposed at regular angular intervals in thecircumferential direction. As shown in FIGS. 3 and 4, in the state wherethe chamber cover 122 is positioned down, the plurality of secondcontact parts 421 of the substrate retaining part 142 are in contactwith the outer edge portion of the substrate 9.

On the lower surface of the top plate 123 and on the supporting partbase 413 of the substrate supporting part 141, provided are a pluralityof pairs of magnets (not shown) in each of which two magnets face eachother in the vertical direction. Hereinafter, each pair of magnets isreferred to also as “a magnet pair”. In the substrate processingapparatus 1, a plurality of magnet pairs are disposed at regular angularintervals at positions different from those of the first contact parts411, the second contact parts 421, the first engagement parts 241, andthe second engagement parts 242 in the circumferential direction. In astate where the substrate retaining part 142 is in contact with thesubstrate 9, with a magnetic force (attractive force) exerted betweeneach magnet pair, a downward force is exerted on the top plate 123. Thesubstrate retaining part 142 thereby presses the substrate 9 toward thesubstrate supporting part 141.

In the substrate processing apparatus 1, the substrate retaining part142 presses the substrate 9 toward the substrate supporting part 141with the weight of the top plate 123 and the magnetic forces of themagnet pairs, and it is thereby possible to strongly hold the substrate9 being sandwiched from above and below by the substrate retaining part142 and the substrate supporting part 141. In the states shown in FIGS.3 and 4, the plate holding part 222 is out of contact with the held part237, and the top plate 123, being independent from the chamber cover122, is rotated by the substrate rotating mechanism 15, together withthe substrate holding part 14 and the substrate 9 held by the substrateholding part 14.

FIG. 5 is a view showing an arrangement of the plurality of gas ejectionnozzles 180 in the lower surface facing part 211 of the chamber bottom210. In FIG. 5, an attachment position of each gas ejection nozzle 180in the lower surface facing part 211 is represented by a solid-linecircle with reference number “1801” (the same applies to FIGS. 8 and 9).

As shown in FIG. 5, four gas ejection nozzles 180 are provided in thelower surface facing part 211. In more detail, the four gas ejectionnozzles 180 are disposed at regular angular intervals (at intervals of90 degrees in FIG. 5) in the circumferential direction around thecentral axis J1. Assuming that two gas ejection nozzles 180 which faceeach other with the central axis J1 interposed therebetween, i.e., twogas ejection nozzles 180 which are disposed at intervals of 180 degreesin the circumferential direction are referred to as a “nozzle pair”, inFIG. 5, two nozzle pairs are provided. In each nozzle pair, a distancebetween an ejection port of one gas ejection nozzle and the central axisJ1 (hereinafter, referred to as an “ejection port-central axisdistance”) and that between an ejection port of the other gas ejectionnozzle and the central axis J1 are equal to each other. Further, anejection port-central axis distance of one nozzle pair is different fromthat of the other nozzle pair. For example, in the substrate processingapparatus 1 used for processing a substrate 9 having a radius of about150 mm, an ejection port-central axis distance of one nozzle pair is 110mm and that of the other nozzle pair is 145 mm.

As described earlier, when the substrate 9 is supported by the substratesupporting part 141 shown in FIG. 1, the facing surface 211 a of thelower surface facing part 211 faces the lower surface 92 of thesubstrate 9. The facing surface 211 a is a sloped surface which goesdownward as a distance from the central axis J1 becomes larger,extending almost entirely over the lower surface 92 of the substrate 9.A distance between the facing surface 211 a and the lower surface 92 ofthe substrate 9 becomes minimum near the lower nozzle 182, e.g., 5 mm.Further, the distance becomes maximum at the outer edge portion of thesubstrate 9, e.g., 30 mm. The plurality of gas ejection nozzles 180protrude from the facing surface 211 a and the respective ejection ports1802 are positioned upper than the facing surface 211 a.

The gas ejection nozzles 180 of the nozzle pair disposed left and rightof the central axis J1 in FIG. 5 (i.e., the gas ejection nozzles 180 towhich the arrows 1803 are not given) are each fixed to the lower surfacefacing part 211 so that its central axis may extend almost along thenormal of the facing surface 211 a at the attachment position 1801.Therefore, these gas ejection nozzles 180 are each inclined with respectto the central axis J1 so that the ejection port 1802 may be positionedslightly outer than the attachment position 1801. Further, the gasejection nozzles 180 of the nozzle pair disposed upper and lower thanthe central axis J1 in FIG. 5 are each fixed to the lower surface facingpart 211, being inclined so that the ejection port 1802 thereof may bepositioned outer than the normal of the facing surface 211 a at theattachment position 1801 (on the opposite side of the central axis J1)(see the arrow 1803). Thus, any gas ejection nozzle 180 in the substrateprocessing apparatus 1 is inclined with respect to the central axis J1with the ejection port 1802 thereof directed upper and slightly outward.

As shown in FIG. 1, the ejection port 1802 of the gas ejection nozzle180 is close to the lower surface 92 of the substrate 9. From theviewpoint of effective heating of the substrate 9, a distance between anupper end of the gas ejection nozzle 180 and the lower surface 92 of thesubstrate 9 in a direction of the central axis J1 is preferably notlarger than 8 mm, and more preferably not larger than 5 mm (the sameapplies to the gas ejection nozzles 180 of FIGS. 8 and 9 describedlater). Further, in order to avoid any contact between the gas ejectionnozzle 180 and the lower surface 92 of the substrate 9, the distancebetween the upper end of the gas ejection nozzle 180 and the lowersurface 92 of the substrate 9 is preferably not smaller than 2 mm.

FIG. 6 is a flowchart showing an operation flow for processing thesubstrate 9 in the substrate processing apparatus 1. In the substrateprocessing apparatus 1, first, in a state where the chamber cover 122 ispositioned upper as shown in FIG. 1, the substrate 9 is loaded into theinternal space of the chamber 12 by an external transfer mechanism andsupported by the substrate supporting part 141 from below (Step S11).Subsequently, when the chamber cover 122 moves down to the positionshown in FIG. 3, the substrate 9 is held by the substrate retaining part142 and the substrate supporting part 141. At that time, the chambercover 122 and the chamber sidewall 214 are separated from each other,and an annular opening 81 is formed between the chamber cover 122 andthe chamber sidewall 214 around the substrate 9 (in other words, outerthan the substrate 9 in the radial direction). Hereinafter, a state ofthe chamber 12 where the annular opening 81 is formed is referred to asa “semiopen state”. Further, the state of FIG. 1 is referred to as an“open state”.

The cup part 161 moves upward from the position shown in FIG. 1, to bepositioned outer than the annular opening 81 in the radial direction allaround the circumference, as shown in FIG. 3. Thus, the cup movingmechanism 162 (see FIG. 1) moves the cup part 161 between a firstposition which is outer than the annular opening 81 in the radialdirection and a second position below the first position (see FIG. 1) inthe vertical direction. In the cup part 161 positioned at the firstposition, the sidewall 611 faces the annular opening 81 in the radialdirection.

In the cup part 161 positioned at the first position, an upper surfaceof the inner edge portion of the upper surface part 612 is in contactwith the lip seal 232 of the chamber cover 122 all around thecircumference. With this contact, between the chamber cover 122 and theupper surface part 612 of the cup part 161, formed is a first seal 615for preventing the passage of gas and/or liquid. Further, an uppersurface of the lower surface part 613 of the cup part 161 is in contactwith a lower surface of the outer seal part 169 of the chamber body 121all around the circumference. With this contact, between the chamberbody 121 and the lower surface part 613 of the cup part 161, formed is asecond seal 616 for preventing the passage of gas and/or liquid.

In the substrate processing apparatus 1, the upper surface part 612 ofthe cup part 161 serves as a first seal part which forms the first seal615 at the first position, and the lower surface part 613 thereof servesas a second seal part which forms the second seal 616 at the firstposition. Then, the chamber 12 in the semiopen state (in other words,the chamber body 121 and the chamber cover 122 in the state where theannular opening 81 is formed) and the cup part 161 positioned at thefirst position form a sealed internal space 160 (hereinafter, referredto as a “sealed space 160”). Thus, in the substrate processing apparatus1, a sealed space forming part which forms the sealed space 160 isachieved by the chamber 12 and the cup part 161.

After the sealed space 160 is formed, rotation of the substrate 9 isstarted by the substrate rotating mechanism 15 at a constant number ofrotation (relatively low number of rotation (rotation speed), andhereinafter, referred to as “the steady number of rotation”). Further,the supply of the inert gas (herein, nitrogen gas) from the inert gassupply part 186 (see FIG. 2) into the sealed space 160 is started, andthe exhaust of gas from the sealed space 160 by the outer gas exhaustpart 194 is also started. After a predetermined time elapses, the sealedspace 160 is thereby brought into an inert gas filled state where theinert gas is filled therein (in other words, into a low oxygenatmosphere where the oxygen concentration is low). Further, the supplyof the inert gas into the sealed space 160 and the exhaust of the gasfrom the sealed space 160 may be performed in the open state shown inFIG. 1.

Subsequently, the supply of the chemical liquid onto the upper surface91 of the substrate 9 is started by the chemical liquid supply part 183(Step S12). As shown in FIG. 3, the chemical liquid from the chemicalliquid supply part 183 is gently and continuously supplied onto thecenter portion of the upper surface 91 of the substrate 9 from the uppernozzle 181 through the opening of the center portion of the top plate123. With the rotation of the substrate 9, the chemical liquid spreadstoward the outer peripheral portion and the entire upper surface 91 isthereby covered with the chemical liquid.

At that time, heated gas is ejected from the plurality of gas ejectionnozzles 180 toward the lower surface 92 of the substrate 9. While thevicinity of a radius position of the substrate 9 corresponding to theejection port-central axis distance of each nozzle pair is therebyuniformly heated all around the circumference, etching is performed onthe upper surface 91 by using the chemical liquid. In an actual case,since the lower surface of the top plate 123 is close to the uppersurface 91 of the substrate 9, the etching of the substrate 9 isperformed in a very narrow space between the lower surface of the topplate 123 and the upper surface 91.

In the sealed space 160, the chemical liquid scattered from the uppersurface 91 of the substrate 9 is received by the cup part 161 throughthe annular opening 81 and flows into the gas-liquid separating part 193through the first exhaust path 191 shown in FIG. 2. In the chemicalliquid collecting part 195, the chemical liquid is collected from thegas-liquid separating part 193, and after removing impurities or thelike from the chemical liquid through a filter or the like, the chemicalliquid is reused.

After a predetermined time (e.g., 60 to 120 seconds) elapses from thestart of the supply of the chemical liquid, the supply of the chemicalliquid from the chemical liquid supply part 183 and the supply of theheated gas from the heated gas supply part 187 are stopped.Subsequently, the substrate rotating mechanism 15 increases the numberof rotation of the substrate 9 to be higher than the steady number ofrotation for a predetermined time period (e.g., 1 to 3 seconds), tothereby remove the chemical liquid from the substrate 9. At that time,since the top plate 123 is rotated together with the substratesupporting part 141, almost no chemical liquid remains on the lowersurface of the top plate 123 and therefore, the chemical liquid neverdrops from the top plate 123.

After the number of rotation of the substrate 9 is decreased to thesteady number of rotation, as shown in FIG. 4, the chamber cover 122 andthe cup part 161 move down. Then, the lip seal 231 of the chamber cover122 comes into contact with the upper portion of the chamber sidewall214, and the chamber 12 thereby forms a sealed internal space 120(hereinafter, referred to as a “sealed space 120”) therein. In a statewhere the chamber 12 is sealed, the substrate 9 directly faces an innerwall of the chamber 12 and there exists no other liquid receiving parttherebetween. After that, the exhaust of the gas by the outer gasexhaust part 194 is stopped and the exhaust of gas from the sealed space120 by the inner gas exhaust part 198 is started. Then, the supply ofthe deionized water serving as a rinse liquid or a cleaning solutiononto the substrate 9 is started by the deionized water supply part 184(Step S13).

The deionized water (pure water) from the deionized water supply part184 is ejected from the upper nozzle 181 and the lower nozzle 182 andcontinuously supplied onto the respective center portions of the uppersurface 91 and the lower surface 92 of the substrate 9. With therotation of the substrate 9, the deionized water spreads toward therespective outer peripheral portions of the upper surface 91 and thelower surface 92 and is scattered outward from an outer peripheral edgeof the substrate 9. The deionized water scattered from the substrate 9is received by the inner wall of the chamber 12 (i.e., the respectiveinner walls of the chamber cover 122 and the chamber sidewall 214) anddiscarded through the second exhaust path 192, the gas-liquid separatingpart 197, and the liquid exhaust part 199 shown in FIG. 2 (the sameapplies to drying of the substrate 9 described later). With thisoperation, as well as a rinse process of the upper surface 91 of thesubstrate 9 and a cleaning process of the lower surface 92 thereof,cleaning of the inside of the chamber 12 is substantially performed.

After a predetermined time elapses from the start of supply of thedeionized water, the supply of the deionized water from the deionizedwater supply part 184 is stopped. Then, in the sealed space 120, thenumber of rotation of the substrate 9 is increased to be sufficientlyhigher than the steady number of rotation. The deionized water isthereby removed from the substrate 9, and drying of the substrate 9 isperformed (Step 14). After a predetermined time elapses from the startof drying of the substrate 9, the rotation of the substrate 9 isstopped.

After that, the chamber cover 122 and the top plate 123 move up, and thechamber 12 is brought into the open state as shown in FIG. 1. In StepS14, since the top plate 123 is rotated together with the substratesupporting part 141, almost no liquid remains on the lower surface ofthe top plate 123 and therefore, no liquid drops from the top plate 123onto the substrate 9 when the chamber cover 122 moves up. The substrate9 is unloaded from the internal space of the chamber 12 by the externaltransfer mechanism (Step S15). Further, after the deionized water supplypart 184 supplies the deionized water and before the substrate 9 isdried, the IPA supply part 185 may supply the IPA onto the substrate 9,to thereby replace the deionized water with the IPA on the substrate 9.

As described above, in the substrate processing apparatus 1, the outeredge portion of the substrate 9 in the horizontal state is supportedfrom below by the substrate supporting part 141 which is an annularsupporting part, and the lower surface facing part 211 having the facingsurface 211 a which faces the lower surface 92 of the substrate 9 isprovided on the inner side of the substrate supporting part 141. Then,the gas ejection nozzles 180 for ejecting heated gas toward the lowersurface 92 of the substrate 9 is provided on the lower surface facingpart 211.

Herein, explanation will be made on a difference in the uniformity ofthe processing of the substrate 9 due to whether or not the lowersurface 92 of the substrate 9 is heated by the gas ejection nozzles 180.FIG. 7 is a graph showing an experimental result on etching. In FIG. 7,the horizontal axis represents a position on the substrate 9 in theradial direction and the vertical axis represents an etching amount.Further, in FIG. 7, the etching amount at each position in a case wherethe lower surface 92 of the substrate 9 is not heated (this case may bethought as a case where the gas ejection nozzles 180 are omitted) isindicated by the broken line L1, and the etching amount at each positionin a case where the lower surface 92 of the substrate 9 is heated isindicated by the one-dot chain line L2. Further, the solid line L3indicates a change in the etching amount in an exemplary case of FIG. 8described later.

As shown in FIG. 7, in the case where the lower surface 92 is notheated, the etching amount becomes low at the outer edge portions of thesubstrate 9. On the other hand, in the case where the lower surface 92is heated, the decrease in the etching amount at the outer edge portionsof the substrate 9 is suppressed. When a value indicating the uniformityis obtained by ((A−B)/2C*100) by using a maximum value A, a minimumvalue B, and an average value C of the etching amount at a plurality ofpositions on the substrate 9, the uniformity of etching in the casewhere the lower surface 92 is not heated is 7%. On the other hand, theuniformity of etching in the case where the lower surface 92 is heatedis 3%, and the uniformity is improved in this case.

Thus, in the substrate processing apparatus 1, when the upper surface 91of the substrate 9 is processed with a processing liquid ejected fromthe upper nozzle 181, by heating the substrate 9 with heated gas ejectedfrom the gas ejection nozzles 180 (preferably, by heating a portion awayfrom the central axis J1, where the temperature is relatively low), itis possible to improve the uniformity of a temperature distribution ofthe substrate 9. As a result, it is possible to improve the uniformityof the processing on the upper surface 91 of the substrate 9 with aprocessing liquid from the upper nozzle 181.

Further, by providing the lower nozzle 182 for ejecting the deionizedwater as a processing liquid on the lower surface facing part 211 as aprocessing liquid nozzle, it is possible to perform the processing ofthe lower surface 92 of the substrate 9 with this processing liquid.Furthermore, since the gas ejection nozzles 180 protrude from the facingsurface 211 a of the lower surface facing part 211, it is possible tosuppress the flow of the processing liquid into the gas ejection nozzles180 through the ejection ports 1802 during the processing of the lowersurface 92 of the substrate 9.

In the substrate processing apparatus 1, since the gas ejection nozzles180 are inclined with respect to the central axis J1, it is possible tofurther suppress the flow of the processing liquid into the gas ejectionnozzles 180. Further, since the distance between the gas ejection nozzle180 and the lower surface 92 of the substrate 9 is not larger than 8 mmin the direction of the central axis J1, it is possible to efficientlyheat the substrate 9. Furthermore, since the distance between theejection port 1802 of one gas ejection nozzle 180 out of the pluralityof gas ejection nozzles 180 and the central axis J1 is different fromthat between the ejection port 1802 of another gas ejection nozzle 180and the central axis J1, it is possible to heat a wide range of thesubstrate 9.

Since the facing surface 211 a is a sloped surface which gets fartheraway from the substrate 9 as a distance from the central axis J1 becomeslarger, it is possible to easily guide the processing liquid used forthe processing of the lower surface 92 of the substrate 9 toward theouter side of the facing surface 211 a. As a result, it is also possibleto prevent the processing liquid from being accumulated on the facingsurface 211 a. Further, depending on the design of the substrateprocessing apparatus 1, the facing surface 211 a may be a surface inparallel with the lower surface 92 of the substrate 9.

Assuming that a substrate processing apparatus in which a substrate isprocessed in an open processing space is considered as a comparativeexample, in the comparative example of substrate processing apparatus,in order to prevent gas containing a chemical liquid component frombeing diffused outside, the gas in the processing space is exhausted ina large flow during the processing of the substrate with the processingliquid. Further, in order to prevent deposition of particles on thesubstrate, a downflow is sometimes formed. Therefore, an airflow fromupper toward lower is formed around the substrate, and a temperature ofthe substrate becomes easy to decrease due to the airflow. The decreasein the temperature of the substrate becomes more remarkable at an outeredge portion of the substrate, and the uniformity of the temperaturedistribution of the substrate is deteriorated. As a result, theuniformity of the processing of the substrate by using the chemicalliquid is deteriorated (in other words, the percent value indicating theuniformity increases). Though it may be possible to suppressdeterioration in the uniformity of the temperature distribution of thesubstrate by supplying the chemical liquid which is heated to a certaintemperature onto the substrate in a large flow, the amount of chemicalliquid consumed disadvantageously increases.

On the other hand, in the substrate processing apparatus 1, since thesealed space 160 which is smaller than the processing space in thecomparative example of substrate processing apparatus is formed by thechamber 12 and the cup part 161 which serve as the sealed space formingpart, it is possible to suppress diffusion of heat from the substrate 9.In an actual case, when the chemical liquid is supplied onto thesubstrate 9 by the chemical liquid supply part 183, the top plate 123becomes close to the upper surface 91 of the substrate 9. The lowersurface facing part 211 is close to the lower surface 92 of thesubstrate 9. It is thereby possible to further suppress the diffusion ofheat from the substrate 9.

In the substrate processing apparatus 1 in which the sealed space 160 isformed, since no gas containing a chemical liquid component diffusesoutside and there is low necessity of the downflow which is formed inorder to prevent deposition of particles on the substrate, it ispossible to set the amount of gas flowing into the sealed space 160 andthe amount of gas flowing out of the sealed space 160 low. Therefore, itis possible to further reduce the decrease in the temperature of thesubstrate 9. As a result, it is possible to improve the uniformity ofthe temperature distribution of the substrate while setting the flowrate of heated gas from the gas ejection nozzles 180 relatively low.Further, since it is not necessary to supply the chemical liquid whichis heated to a certain temperature onto the substrate 9 in a large flow(in other words, it is possible to reduce the amount of chemical liquidconsumed), it is possible to also reduce the COO (Cost Of Ownership) ofthe substrate processing apparatus 1.

In the substrate processing apparatus 1, in the processing using thechemical liquid, the sealed space 160 is brought into an inert gasfilled state (i.e., a low oxygen atmosphere) and further, the heatedinert gas is ejected from the gas ejection nozzles 180. It therebybecomes possible to use not only an inorganic chemical liquid but also aflammable organic chemical liquid or the like, and the explosion-proofcountermeasure becomes easy.

FIG. 8 is a view showing another exemplary arrangement of the pluralityof gas ejection nozzles 180 in the lower surface facing part 211. On thelower surface facing part 211 shown in FIG. 8, provided are six gasejection nozzles 180 each protruding from the facing surface 211 a. Inmore detail, four gas ejection nozzles 180 among the six gas ejectionnozzles 180 are arranged in the same manner as the four gas ejectionnozzles 180 shown in FIG. 5 are arranged. The other two gas ejectionnozzles 180 are arranged near the central axis J1 at intervals of 180degrees in the circumferential direction. Thus, in FIG. 8, three nozzlepairs are provided, and the respective ejection port-central axisdistances of the three nozzle pairs are different from one another. Inthe substrate processing apparatus 1 used for processing the substrate 9having a radius of about 150 mm, for example, the ejection port-centralaxis distance of one nozzle pair is 110 mm, the ejection port-centralaxis distance of another nozzle pair is 145 mm, and the ejectionport-central axis distance of the other nozzle pair is smaller than 110mm.

The facing surface 211 a is a sloped surface which goes downward as adistance from the central axis J1 becomes larger and all the gasejection nozzles 180 are each inclined with respect to the central axisJ1 (the same applies to still another example of FIG. 9 describedlater). As indicated by the solid line L3 in FIG. 7, in the exemplaryarrangement of FIG. 8 as compared with the exemplary arrangement of FIG.5, the decrease in the etching amount at the outer edge portions of thesubstrate 9 is further suppressed, and the uniformity of the etchingprocess is 1%.

FIG. 9 is a view showing still another exemplary arrangement of theplurality of gas ejection nozzles 180 in the lower surface facing part211. In FIG. 9, three nozzle pairs are provided, and the respectiveejection port-central axis distances of the three nozzle pairs aredifferent from one another. In the substrate processing apparatus 1 usedfor processing the substrate 9 having a radius of about 150 mm, forexample, the ejection port-central axis distance of one nozzle pair is65 mm, the ejection port-central axis distance of another nozzle pair is90 mm, and the ejection port-central axis distance of the other nozzlepair is 145 mm.

In an actual case, the gas ejection nozzles 180 of the nozzle pairhaving the minimum ejection port-central axis distance are each fixed tothe lower surface facing part 211, being inclined so that the ejectionport 1802 thereof may be positioned inner than the attachment position1801 (see the arrow 1803). In the gas ejection nozzle 180, the ejectionport 1802 thereof is directed upper and slightly inward. The other gasejection nozzles 180 are each fixed to the lower surface facing part 211almost along the normal of the facing surface 211 a which is a slopedsurface. Also in the exemplary arrangement of FIG. 9, the uniformity ofthe processing on the upper surface 91 of the substrate 9 can beimproved.

The above-described substrate processing apparatus 1 allows variousvariations. Assuming that the processing liquid supplied onto the uppersurface 91 of the substrate 9 is a first processing liquid, though thechemical liquid is supplied onto the upper surface 91 as the firstprocessing liquid from the chemical liquid supply part 183 which is afirst processing liquid supply part in the above-described substrateprocessing apparatus 1, the first processing liquid may be a processingliquid other than the chemical liquid. Similarly, assuming that theprocessing liquid supplied onto the lower surface 92 of the substrate 9is a second processing liquid, though the deionized water is suppliedonto the lower surface 92 as the second processing liquid from thedeionized water supply part 184 which is a second processing liquidsupply part in the above-described substrate processing apparatus 1, thesecond processing liquid may be any other processing liquid.

In the substrate processing apparatus 1 of FIG. 1, though the sealedspace 160 is formed by the chamber 12 and the cup part 161 when thechemical liquid is supplied and the sealed space 120 is formed only bythe chamber 12 when the deionized water is supplied, depending on thedesign of the substrate processing apparatus, the cup part 161 may beomitted and a sealed internal space may be formed only by the chamber 12both when the chemical liquid is supplied and when the deionized wateris supplied. Thus, the sealed space forming part which forms the sealedinternal space in which the processing of the substrate 9 is performedby using the first processing liquid and the second processing liquidcan be achieved in various manners.

In the substrate processing apparatus 1 of FIG. 1, the chamber cover 122may be omitted, and the substrate 9 may be processed in an openprocessing space. Further, the annular supporting part which supportsthe outer edge portion of the substrate 9 in the horizontal state frombelow can be achieved in various manners. In the case where the chambercover 122 is omitted as mentioned above, for example, a mechanism forgripping the substrate 9 is provided in the substrate supporting part141.

In the above-described substrate processing apparatus 1, the substraterotating mechanism which rotates the substrate supporting part 141having an annular shape around the central axis J1 together with thesubstrate 9 around the central axis J1 may be achieved by a constitution(for example, a combination of an annular gear provided on the annularsubstrate supporting part 141 and a motor which engages with the gear torotate the gear) other than the hollow motor having the annular statorpart 151 and the annular rotor part 152. Further, depending on thedesign of the substrate processing apparatus 1, a rotating mechanism mayrotate the lower surface facing part 211 with respect to the substrate9. In other words, in the substrate processing apparatus 1, provided isa rotating mechanism for relatively rotating the substrate supportingpart 141 together with the substrate 9 around the central axis J1 withrespect to the lower surface facing part 211.

Furthermore, only one gas ejection nozzle 180 may be provided in thelower surface facing part 211. In other words, in the substrateprocessing apparatus 1, by providing at least one gas ejection nozzle180 in the lower surface facing part 211, it becomes possible to heatthe lower surface 92 of the substrate 9.

The substrate to be processed in the substrate processing apparatus isnot limited to a semiconductor substrate, but may be a glass substrateor other substrates.

FIG. 10 is a cross-sectional view showing a substrate processingapparatus 1 a in accordance with the second preferred embodiment of thepresent invention. The substrate processing apparatus 1 a is asingle-substrate processing apparatus for supplying a processing liquidto a semiconductor substrate 9 (hereinafter, referred to simply as a“substrate 9”) having a substantially disk-like shape, to therebyprocess substrates 9 one by one. In FIG. 10, hatching of the crosssections of some constituent elements in the substrate processingapparatus 1 a is omitted (the same applies to other cross-sectionalviews).

The substrate processing apparatus 1 a includes the chamber 12, the topplate 123, the chamber opening and closing mechanism 131, the substrateholding part 14, the substrate rotating mechanism 15, the liquidreceiving part 16, and the cover 17.

The chamber 12 includes the chamber body 121 and the chamber cover 122.The chamber body 121 and the chamber cover 122 are each formed of anon-magnetic material. The chamber body 121 includes the chamber bottom210 and the chamber sidewall 214. The chamber bottom 210 includes thecenter portion 211 having a substantially disk-like shape, the innersidewall 212 having a cylindrical shape extending downward from an outeredge portion of the center portion 211, and the base part 213 extendingfrom the inner sidewall 212 outward in the radial direction. The chambersidewall 214 has an annular shape around the central axis J1 directed inthe vertical direction, protruding upward from a middle portion of thebase part 213 in the radial direction. A member forming the chambersidewall 214 also serves as part of the liquid receiving part 16, asdescribed later. In the following description, a space surrounded by thechamber sidewall 214, the inner sidewall 212, and the base part 213 isreferred to as the lower annular space 217. When the substrate 9 issupported by the substrate supporting part 141 (described later) of thesubstrate holding part 14, the lower surface 92 of the substrate 9 facesthe upper surface 211 a of the center portion 211.

The chamber cover 122 has a substantially disk-like shape perpendicularto the central axis J1, including the upper portion of the chamber 12.The chamber cover 122 closes the upper opening of the chamber body 121.FIG. 10 shows a state where the chamber cover 122 is separated from thechamber body 121. When the chamber cover 122 closes the upper opening ofthe chamber body 121, the outer edge portion of the chamber cover 122comes into contact with the upper portion of the chamber sidewall 214.

The chamber opening and closing mechanism 131 moves the chamber cover122 which is a movable part of the chamber 12 relatively to the chamberbody 121 which is the other portion of the chamber 12 in the verticaldirection. The chamber opening and closing mechanism 131 serves as thecover up-and-down moving mechanism for moving the chamber cover 122 upand down. When the chamber opening and closing mechanism 131 moves thechamber cover 122 in the vertical direction, the top plate 123 is alsomoved, together with the chamber cover 122, in a certain range in thevertical direction. When the chamber cover 122 comes into contact withthe chamber body 121 to close the upper opening thereof and the chambercover 122 is pressed toward the chamber body 121, an internal space (seeFIG. 13 described later) which is sealed is formed inside the chamber12.

The substrate holding part 14 is disposed in the chamber 12 and holdsthe substrate 9 in the horizontal state. In other words, the substrate 9is held by the substrate holding part 14, in a state where the uppersurface 91 thereof is directed upward, being perpendicular to thecentral axis J1. The substrate holding part 14 includes theabove-described substrate supporting part 141 for supporting the outeredge portion of the substrate 9 from below and the substrate retainingpart 142 for retaining the outer edge portion of the substrate 9 fromabove, which is supported by the substrate supporting part 141. Thesubstrate supporting part 141 includes the supporting part base 413having a substantially annular disk-like shape around the central axisJ1 and the plurality of first contact parts 411 fixed to the uppersurface of the supporting part base 413. The substrate retaining part142 includes the plurality of second contact parts 421 fixed to thelower surface of the top plate 123. Positions of the plurality of secondcontact parts 421 in the circumferential direction are actuallydifferent from those of the plurality of first contact parts 411 in thecircumferential direction.

The top plate 123 has a substantially disk-like shape perpendicular tothe central axis J1. The top plate 123 is disposed below the chambercover 122 and above the substrate supporting part 141. The top plate 123has the opening at its center portion. When the substrate 9 is supportedby the substrate supporting part 141, the upper surface 91 of thesubstrate 9 faces the lower surface of the top plate 123 which isperpendicular to the central axis J1. A diameter of the top plate 123 islarger than that of the substrate 9, and the outer edge portion of thetop plate 123 is positioned outer than the outer edge portion of thesubstrate 9 in the radial direction all around the circumference. Thus,the top plate 123 extends along the upper surface 91 so as to cover thesubstrate 9 above the substrate 9.

In the state of FIG. 10, the top plate 123 is supported by the chambercover 122. In more detail, on the lower surface of the chamber cover122, the plate holding part 222 having an annular shape is provided. Theplate holding part 222 includes the cylindrical portion 223 having asubstantially cylindrical shape around the central axis J1 and theflange portion 224 having a substantially annular shape around thecentral axis J1. The cylindrical portion 223 extends downward from thelower surface of the chamber cover 122. The flange portion 224 extendsfrom the lower end of the cylindrical portion 223 outward in the radialdirection.

The top plate 123 includes the held part 237 having an annular shape.The held part 237 includes the cylindrical portion 238 having asubstantially cylindrical shape around the central axis J1 and theflange portion 239 having a substantially annular shape around thecentral axis J1. The cylindrical portion 238 extends upward from theupper surface of the top plate 123. The flange portion 239 extends fromthe upper end of the cylindrical portion 238 inward in the radialdirection. The cylindrical portion 238 is positioned outer than thecylindrical portion 223 of the plate holding part 222 in the radialdirection and faces the cylindrical portion 223 in the radial direction.The flange portion 239 is positioned above the flange portion 224 of theplate holding part 222 and faces the flange portion 224 in the verticaldirection. When the lower surface of the flange portion 239 of the heldpart 237 comes into contact with the upper surface of the flange portion224 of the plate holding part 222, the top plate 123 is attached to thechamber cover 122, being suspended from the chamber cover 122.

The substrate rotating mechanism 15 of FIG. 10 is a so-called hollowmotor. The substrate rotating mechanism 15 includes the stator part 151having an annular shape around the central axis J1 and the rotor part152 having an annular shape. The rotor part 152 includes a permanentmagnet having a substantially annular shape. A surface of the permanentmagnet is molded of a PTFE (polytetrafluoroethylene) resin. The rotorpart 152 is disposed inside the lower annular space 217 in the internalspace of the chamber 12. Above the rotor part 152, attached is thesupporting part base 413 of the substrate supporting part 141 with aconnecting member interposed therebetween. The supporting part base 413is disposed above the rotor part 152.

The stator part 151 is disposed in the periphery of the rotor part 152outside the chamber 12 (in other words, outside the internal space),i.e., disposed outer in the radial direction. In the present preferredembodiment, the stator part 151 is fixed to the base part 213 andpositioned below the liquid receiving part 16. The stator part 151includes a plurality of coils arranged in the circumferential directionaround the central axis J1.

By supplying current to the stator part 151, a rotating force isgenerated around the central axis J1 between the stator part 151 and therotor part 152. The rotor part 152 is thereby rotated in the horizontalstate around the central axis J1. With a magnetic force exerted betweenthe stator part 151 and the rotor part 152, the rotor part 152 floats inthe chamber 12, not being in direct or indirect contact with the chamber12, and rotates the substrate 9, being in a floating state, togetherwith the substrate supporting part 141 around the central axis J1.

The liquid receiving part 16 includes the cup part 161 and the cupmoving mechanism 162. As described earlier, part of the member formingthe chamber sidewall 214 is included in the liquid receiving part 16.The cup part 161 has an annular shape around the central axis J1 and ispositioned outer than the chamber sidewall 214 in the radial direction.The cup moving mechanism 162 moves the cup part 161 in the verticaldirection.

The lower portion of the cup part 161 is positioned inside the liquidreceiving recessed portion 165 which has an annular shape and ispositioned outer than the chamber sidewall 214. At the upper end portionof the outer wall 168 having a substantially cylindrical shapesurrounding the outer periphery of the liquid receiving recessed portion165, the outer seal part 169 having a substantially annular disk-likeshape around the central axis J1 is fixed. The outer seal part 169extends from the upper end portion of the outer wall 168 inward in theradial direction, to cover the outer peripheral portion of the upperopening of the liquid receiving recessed portion 165 all around thecircumference.

The upper nozzle 181 is fixed to the center portion of the chamber cover122. The upper nozzle 181 is insertable into the opening of the centerportion of the top plate 123. At the center of the center portion 211 ofthe chamber bottom 210, the lower nozzle 182 is attached. The bottomportion of the liquid receiving recessed portion 165 is connected to thefirst exhaust path 191. The bottom portion of the lower annular space217 between the inner sidewall 212 and the chamber sidewall 214 isconnected to the second exhaust path 192. The positions for attachmentof the upper nozzle 181 and the lower nozzle 182 are not necessarilylimited to the center portion, but may be, for example, positions facingthe peripheral portion of the substrate 9.

FIG. 11 is a block diagram showing a processing liquid supply part 18 a,the inert gas supply part 186 and the gas-liquid exhaust part 19included in the substrate processing apparatus 1 a. The processingliquid supply part 18 a includes the chemical liquid supply part 183,the deionized water supply part 184, and the IPA supply part 185,besides the upper nozzle 181 and the lower nozzle 182 described above.The chemical liquid supply part 183, the deionized water supply part184, and the IPA supply part 185 are each connected to the upper nozzle181 with a valve interposed therebetween. The lower nozzle 182 isconnected to the deionized water supply part 184 with a valve interposedtherebetween. The upper nozzle 181 is also connected to the inert gassupply part 186 with a valve interposed therebetween. The upper nozzle181 has the liquid ejection port at its center portion and has the gasejection port therearound. Therefore, exactly, part of the upper nozzle181 is part of a gas supply part for supplying gas into the chamber 12in a broad sense. The lower nozzle 182 has the liquid ejection port atits center portion.

The first exhaust path 191 connected to the liquid receiving recessedportion 165 of the liquid receiving part 16 is connected to thegas-liquid separating part 193. The gas-liquid separating part 193 isconnected to the outer gas exhaust part 194, the chemical liquidcollecting part 195, and the liquid exhaust part 196 each with a valveinterposed therebetween. The second exhaust path 192 connected to thechamber bottom 210 is connected to the gas-liquid separating part 197.The gas-liquid separating part 197 is connected to the inner gas exhaustpart 198 and the liquid exhaust part 199 each with a valve interposedtherebetween. The constituent elements in the processing liquid supplypart 18 a, the inert gas supply part 186, and the gas-liquid exhaustpart 19 are controlled by the control part 10. The chamber opening andclosing mechanism 131, the substrate holding part 14, the substraterotating mechanism 15, and the cup moving mechanism 162 (see FIG. 10)are also controlled by the control part 10.

In the present preferred embodiment, a chemical liquid supplied from thechemical liquid supply part 183 onto the substrate 9 through the uppernozzle 181 is an etching solution such as hydrofluoric acid, atetramethylammonium hydroxide solution, or the like. The deionized watersupply part 184 supplies deionized water (DIW) onto the substrate 9through the upper nozzle 181 or the lower nozzle 182. The IPA supplypart 185 supplies isopropyl alcohol (IPA) onto the substrate 9 throughthe upper nozzle 181. In the substrate processing apparatus 1 a, aprocessing liquid supply part for supplying any processing liquid otherthan the above processing liquids may be provided. Further, the inertgas supply part 186 supplies an inert gas into the chamber 12 throughthe upper nozzle 181. In the present preferred embodiment, the inert gasis nitrogen gas (N₂), but any gas other than nitrogen gas may be used.

As shown in FIG. 10, the cup part 161 includes the sidewall 611, theupper surface part 612, and the lower surface part 613. The sidewall 611has a substantially cylindrical shape around the central axis J1. Theupper surface part 612 has a substantially annular disk-like shapearound the central axis J1, extending from the upper end portion of thesidewall 611 inward in the radial direction. The lower surface part 613has substantially annular disk-like shape around the central axis J1,extending from the lower end portion of the sidewall 611 outward in theradial direction. The upper surface part 612 and the lower surface part613 are substantially perpendicular to the central axis J1. In the stateof FIG. 10, almost the whole of the sidewall 611 and the lower surfacepart 613 in the cup part 161 are positioned inside the liquid receivingrecessed portion 165.

On the lower surface of the outer edge portion of the chamber cover 122,provided are lip seals 231 and 232 each having an annular shape. The lipseal 231 is positioned above the upper end portion of the chambersidewall 214. The lip seal 232 is positioned above the inner edgeportion of the upper surface part 612 of the cup part 161. When thechamber cover 122 shown in FIG. 10 moves down and the cup part 161 movesup, as shown in FIG. 12, the lip seal 232 comes into contact with theinner edge portion of the upper surface part 612 of the cup part 161 inthe vertical direction. Further, when the chamber cover 122 moves downto the chamber sidewall 214, as shown in FIG. 13, the lip seal 231 comesinto contact with the upper end portion of the chamber sidewall 214 inthe vertical direction.

As shown in FIG. 10, on the lower surface of the outer edge portion ofthe top plate 123, the plurality of first engagement parts 241 arearranged in the circumferential direction, and on the upper surface ofthe supporting part base 413, the plurality of second engagement parts242 are arranged in the circumferential direction. It is preferable thatthese engagement parts should be provided in three or more pairs, and inthe present preferred embodiment, four pairs are provided. At the lowerportion of the first engagement part 241, provided is a recessed portionwhich is recessed upward. The second engagement part 242 protrudesupward from the supporting part base 413.

When the chamber cover 122 moves down, as shown in FIGS. 12 and 13, thesecond engagement part 242 engages with the recessed portion of thefirst engagement part 241. The top plate 123 thereby engages with thesupporting part base 413 of the substrate supporting part 141 in thecircumferential direction around the central axis J1. In other words,the first engagement part 241 and the second engagement part 242 serveas the position regulating member for regulating a relative position ofthe top plate 123 with respect to the substrate supporting part 141 inthe rotation direction (for fixing the relative position in thecircumferential direction). When the chamber cover 122 moves down, thesubstrate rotating mechanism 15 controls the rotation position of thesupporting part base 413 so that the first engagement part 241 mayengage with the second engagement part 242. Further, in the states ofFIGS. 12 and 13, the plate holding part 222 releases holding of the topplate 123.

As described earlier, on the upper surface of the supporting part base413 shown in FIG. 10, the plurality of first contact parts 411 of thesubstrate supporting part 141 are arranged in the circumferentialdirection. The plurality of first contact parts 411 are disposed innerthan the plurality of second engagement parts 242 in the radialdirection. Further, on the lower surface of the outer edge portion ofthe top plate 123, the plurality of second contact parts 421 of thesubstrate retaining part 142 are arranged in the circumferentialdirection. The second contact parts 421 are disposed inner than theplurality of first engagement parts 241 in the radial direction. Asdescribed above, the positions of the plurality of second contact parts421 in the circumferential direction are actually different from thoseof the plurality of first contact parts 411 in the circumferentialdirection. In the present preferred embodiment, four first contact parts411 are arranged at regular angular intervals in the circumferentialdirection. Further, in the circumferential direction, two second contactparts 421 are disposed adjacently on both sides of each first contactpart 411, and assuming that the two second contact parts 421 adjacent toone first contact part 411 are regarded as one pair, four pairs ofsecond contact parts 421 are disposed at regular angular intervals inthe circumferential direction. As shown in FIGS. 12 and 13, in the statewhere the chamber cover 122 is positioned down, the plurality of secondcontact parts 421 of the substrate retaining part 142 are in contactwith the outer edge portion of the substrate 9.

On the lower surface of the top plate 123 and on the supporting partbase 413 of the substrate supporting part 141, provided are a pluralityof pairs of magnets (not shown) in each of which two magnets face eachother in the vertical direction. Hereinafter, each pair of magnets isreferred to also as “a magnet pair”. In the substrate processingapparatus 1 a, a plurality of magnet pairs are disposed at regularangular intervals at positions different from those of the first contactparts 411, the second contact parts 421, the first engagement parts 241,and the second engagement parts 242 in the circumferential direction. Ina state where the substrate retaining part 142 is in contact with thesubstrate 9, with a magnetic force (attractive force) exerted betweeneach magnet pair, a downward force is exerted on the top plate 123. Thesubstrate retaining part 142 thereby presses the substrate 9 toward thesubstrate supporting part 141.

In the substrate processing apparatus 1 a, the substrate retaining part142 presses the substrate 9 toward the substrate supporting part 141with the weight of the top plate 123 and the magnetic forces of themagnet pairs, and it is thereby possible to strongly hold the substrate9 being sandwiched from above and below by the substrate retaining part142 and the substrate supporting part 141. In the states shown in FIGS.12 and 13, the plate holding part 222 is out of contact with the heldpart 237, and the top plate 123, being independent from the chambercover 122, is rotated by the substrate rotating mechanism 15, togetherwith the substrate holding part 14 and the substrate 9 held by thesubstrate holding part 14.

FIG. 14 is a flowchart showing an operation flow for processing thesubstrate 9 in the substrate processing apparatus 1 a. FIG. 15 is atiming chart showing operation timings of constituent elements in thesubstrate processing apparatus 1 a under the control of the control part10. In FIG. 15, from the top stage downward, the operation timings ofthe substrate rotating mechanism 15, the chemical liquid supply part183, the deionized water supply part 184, the outer gas exhaust part194, the inner gas exhaust part 198, and the inert gas supply part 186are shown in this order. The process surrounded by broken line in FIG.14 is performed in an exemplary processing described later.

In the substrate processing apparatus 1 a, first, in a state where thechamber cover 122 is positioned upper as shown in FIG. 10, the substrate9 is loaded into the internal space of the chamber 12 by an externaltransfer mechanism and supported by the substrate supporting part 141from below (Step S21). Subsequently, when the chamber cover 122 movesdown to the position shown in FIG. 12, the substrate 9 is held by thesubstrate retaining part 142 and the substrate supporting part 141. Atthat time, the chamber cover 122 and the chamber sidewall 214 areseparated from each other, and the annular opening 81 is formed betweenthe chamber cover 122 and the chamber sidewall 214 around the substrate9 (in other words, outer than the substrate 9 in the radial direction).Hereinafter, a state of the chamber 12 where the annular opening 81 isformed is referred to as the “semiopen state”. Further, the state ofFIG. 10 is referred to as the “open state”.

The cup part 161 moves upward from the position shown in FIG. 10, to bepositioned outer than the annular opening 81 in the radial direction allaround the circumference, as shown in FIG. 12. Thus, the cup movingmechanism 162 (see FIG. 10) moves the cup part 161 between the firstposition which is outer than the annular opening 81 in the radialdirection and the second position below the first position (see FIG. 10)in the vertical direction. In the cup part 161 positioned at the firstposition, the sidewall 611 faces the annular opening 81 in the radialdirection.

In the cup part 161 positioned at the first position, the upper surfaceof the inner edge portion of the upper surface part 612 is in contactwith the lip seal 232 of the chamber cover 122 all around thecircumference. With this contact, between the chamber cover 122 and theupper surface part 612 of the cup part 161, formed is the first seal 615for preventing the passage of gas and/or liquid. Further, the uppersurface of the lower surface part 613 of the cup part 161 is in contactwith the lower surface of the outer seal part 169 of the chamber body121 all around the circumference. With this contact, between the chamberbody 121 and the lower surface part 613 of the cup part 161, formed isthe second seal 616 for preventing the passage of gas and/or liquid.

In the substrate processing apparatus 1 a, the upper surface part 612 ofthe cup part 161 serves as the first seal part which forms the firstseal 615 at the first position, and the lower surface part 613 thereofserves as the second seal part which forms the second seal 616 at thefirst position. Then, the chamber 12 in the semiopen state (in otherwords, the chamber body 121 and the chamber cover 122 in the state wherethe annular opening 81 is formed) and the cup part 161 positioned at thefirst position form the sealed internal space 160 (hereinafter, referredto as the “sealed space 160”). Thus, in the substrate processingapparatus 1 a, the sealed space forming part which forms the sealedspace 160 is achieved, by the chamber 12 and the cup part 161.

After the sealed space 160 is formed at the time T1 in FIG. 15, rotationof the substrate 9 is started by the substrate rotating mechanism 15 ata constant number of rotation (relatively low number of rotation, andhereinafter, referred to as “the steady number of rotation”). Further,the supply of the inert gas (herein, nitrogen gas) from the inert gassupply part 186 into the sealed space 160 is started, and the exhaust ofgas from the sealed space 160 by the outer gas exhaust part 194 is alsostarted. The supply of the inert gas into the sealed space 160 throughthe upper nozzle 181 and the exhaust of the gas from the sealed space160 through the first exhaust path 191 are continued for a certain timeperiod or more. The sealed space 160 is thereby brought into the inertgas filled state where the inert gas is filled therein (in other words,into the low oxygen atmosphere where the oxygen concentration is low)(Step S22). Further, the supply of the inert gas into the sealed space160 and the exhaust of the gas from the sealed space 160 may beperformed in the open state shown in FIG. 10.

As shown in FIG. 15, at the time T2 after a predetermined time (e.g., 20seconds) elapses from the formation of the sealed space 160, the supplyof the inert gas into the sealed space 160 by the inert gas supply part186 and the exhaust of the gas from the sealed space 160 by the outergas exhaust part 194 are stopped. Further, almost concurrently withthese operations (e.g., within several seconds before or after theseoperations), the supply of the chemical liquid onto the upper surface 91of the substrate 9 is started by the chemical liquid supply part 183(Step S23). As shown in FIG. 12, the chemical liquid from the chemicalliquid supply part 183 is gently and continuously supplied onto thecenter portion of the upper surface 91 of the substrate 9 from the uppernozzle 181 through the opening of the center portion of the top plate123. With the rotation of the substrate 9, the chemical liquid spreadstoward the outer peripheral portion and the entire upper surface 91 isthereby covered with the chemical liquid.

As described earlier, the supply of the chemical liquid onto the uppersurface 91 of the substrate 9 is performed while the supply of the inertgas into the sealed space 160 and the exhaust of the gas from the sealedspace 160 are stopped. Therefore, etching is performed on the uppersurface 91 by using the chemical liquid in the sealed space 160 which isin the inert gas filled state, with the flow of the gas into/from thesealed space 160 blocked. In an actual case, since the lower surface ofthe top plate 123 is close to the upper surface 91 of the substrate 9,the etching of the substrate 9 is performed in a very narrow spacebetween the lower surface of the top plate 123 and the upper surface 91.

In the sealed space 160, the chemical liquid scattered from the uppersurface 91 of the substrate 9 is received by the cup part 161 throughthe annular opening 81 and flows into the gas-liquid separating part 193through the first exhaust path 191 shown in FIG. 11. In the chemicalliquid collecting part 195, the chemical liquid is collected from thegas-liquid separating part 193, and after removing impurities or thelike from the chemical liquid through a filter or the like, the chemicalliquid is reused.

As shown in FIG. 15, at the time T3 after a predetermined time (e.g., 60to 120 seconds) elapses from the start of the supply of the chemicalliquid, the supply of the chemical liquid from the chemical liquidsupply part 183 is stopped. Then, the substrate rotating mechanism 15increases the number of rotation of the substrate 9 to be higher thanthe steady number of rotation for a predetermined time period (e.g., 1to 3 seconds) until the time T4, to thereby remove the chemical liquidfrom the substrate 9. At that time, since the top plate 123 is rotatedtogether with the substrate supporting part 141, almost no chemicalliquid remains on the lower surface of the top plate 123 and therefore,the chemical liquid never drops from the top plate 123.

At the time T4, the number of rotation of the substrate 9 is decreasedto the steady number of rotation. Further, as shown in FIG. 13, thechamber cover 122 and the cup part 161 move down. Then, the lip seal 231of the chamber cover 122 comes into contact with the upper portion ofthe chamber sidewall 214, and the chamber 12 thereby forms the sealedinternal space 120 (hereinafter, referred to as the “sealed space 120”)therein. In a state where the chamber 12 is sealed, the substrate 9directly faces the inner wall of the chamber 12 and there exists noother liquid receiving part therebetween. Further, the supply of theinert gas into the sealed space 120 from the inert gas supply part 186is started again and the exhaust of the gas from the sealed space 120 bythe inner gas exhaust part 198 is started. Furthermore, the supply ofthe deionized water serving as the rinse liquid onto the substrate 9 isstarted by the deionized water supply part 184 serving as a rinse liquidsupply part (Step S24).

The deionized water from the deionized water supply part 184 is ejectedfrom the upper nozzle 181 and the lower nozzle 182 and continuouslysupplied onto the respective center portions of the upper surface 91 andthe lower surface 92 of the substrate 9. With the rotation of thesubstrate 9, the deionized water spreads toward the respective outerperipheral portions of the upper surface 91 and the lower surface 92 andis scattered outward from the outer peripheral edge of the substrate 9.The deionized water scattered from the substrate 9 is received by theinner wall of the chamber 12 (i.e., the respective inner walls of thechamber cover 122 and the chamber sidewall 214) and discarded throughthe second exhaust path 192, the gas-liquid separating part 197, and theliquid exhaust part 199 shown in FIG. 11 (the same applies to drying ofthe substrate 9 described later). With this operation, cleaning of theinside of the chamber 12 is substantially performed. In an actual case,after the number of rotation of the substrate 9 is decreased to thesteady number of rotation, the chamber cover 122 and the cup part 161move to form the sealed space 120 shown in FIG. 13 and subsequently thesupply of the deionized water from the deionized water supply part 184is started, and therefore, there is a slight time lag between theseoperations, but in FIG. 15, for convenience of illustration, the timelag is ignored.

At the time T5 after a predetermined time elapses from the start ofsupply of the deionized water, the supply of the deionized water fromthe deionized water supply part 184 is stopped. Then, in the sealedspace 120, the number of rotation of the substrate 9 is increased to besufficiently higher than the steady number of rotation. The deionizedwater is thereby removed from the substrate 9, and drying of thesubstrate 9 is performed (Step S25). At the time T6 after apredetermined time elapses from the start of drying of the substrate 9,the rotation of the substrate 9 is stopped.

After that, the chamber cover 122 and the top plate 123 move up, and thechamber 12 is brought into the open state as shown in FIG. 10. In StepS25, since the top plate 123 is rotated together with the substratesupporting part 141, almost no liquid remains on the lower surface ofthe top plate 123 and therefore, no liquid drops from the top plate 123onto the substrate 9 when the chamber cover 122 moves up. The substrate9 is unloaded from the internal space of the chamber 12 by the externaltransfer mechanism (Step S26). Further, after the deionized water supplypart 184 supplies the deionized water and before the substrate 9 isdried, the IPA supply part 185 may supply the IPA onto the substrate 9,to thereby replace the deionized water with the IPA on the substrate 9.

Herein, description will be made on a comparative example of thesubstrate processing apparatus in which the supply of the inert gas intothe sealed space 160 and the exhaust of the gas from the sealed space160 are continued in the processing of the substrate 9 by using thechemical liquid in Step S23. In the substrate processing apparatus ofthis comparative example, since the flow of the gas into/from (into andfrom) the sealed space 160 continues when the chemical liquid (water orthe like contained therein) supplied onto the substrate 9 is vaporized,a humidity of the sealed space 160 is hard to be high. Therefore, thevaporization of the chemical liquid continuously occurs, and thetemperature of the substrate 9 decreases due to the heat ofvaporization. The decrease in the temperature of the substrate 9 becomesremarkable at the outer edge portion of the substrate 9, and theuniformity of the temperature distribution of the substrate isdeteriorated. As a result, the uniformity of the processing of thesubstrate 9 by using the chemical liquid is deteriorated.

Though it may be possible to suppress deterioration in the uniformity ofthe temperature distribution of the substrate 9 by supplying thechemical liquid which is heated to a certain temperature onto thesubstrate 9 in a large flow, the amount of chemical liquid consumeddisadvantageously increases. In the substrate processing apparatus wherethe substrate is processed in an open processing space, like in JapanesePatent Application Laid-Open No. 2002-305177 (Document 2), in order toprevent diffusion of the gas containing the chemical liquid component tothe outside, it is absolutely necessary to exhaust the gas from theprocessing space by an gas exhaust part in the processing of thesubstrate by using the chemical liquid. Therefore, like in the substrateprocessing apparatus of the above comparative example, the uniformity ofthe substrate processing using the chemical liquid is deteriorated.Actually, in such a substrate processing apparatus, in order to preventdeposition of particles onto the substrate, a downflow is also formed,and in this case, the uniformity of the processing of the substrate byusing the chemical liquid is further deteriorated.

On the other hand, in the substrate processing apparatus 1 a, the sealedspace 160 is formed by the chamber 12 and the cup part 161 serving asthe sealed space forming part, and when the chemical liquid is suppliedonto the substrate 9 by the chemical liquid supply part 183, the supplyof the inert gas into the sealed space 160 and the exhaust of the gasfrom the sealed space 160 are stopped. Thus, by supplying the chemicalliquid onto the substrate 9 in the sealed space 160 in which the inflowand the outflow of gas are blocked, it is possible to keep a state wherethe sealed space 160 is humidified mainly by water contained in thechemical liquid (as a matter of course, the chemical liquid componentmay be contained in the atmosphere inside the sealed space 160). As aresult, it is possible to suppress deterioration in the uniformity ofthe temperature distribution of the substrate 9 due to the vaporizationof the chemical liquid, and therefore, it is possible to perform uniformprocessing on the upper surface 91 of the substrate 9 by using thechemical liquid with the amount of chemical liquid consumption reduced.Further, it is possible to reduce the COO (Cost Of Ownership) of thesubstrate processing apparatus 1 a.

FIG. 16 is a graph showing an experimental result on etching. In FIG.16, “exhaust-ON” indicates the uniformity of the etching in thesubstrate processing apparatus of the comparative example and“exhaust-OFF” indicates the uniformity of the etching in the substrateprocessing apparatus 1 a of FIG. 10. Herein, it is assumed that a valueindicating the uniformity (Etching Unif.) is obtained by(((A−B)/2C)*100) by using a maximum value A, a minimum value B, and anaverage value C of the etching amount at a plurality of positions on thesubstrate 9. The uniformity of etching in the substrate processingapparatus 1 a is 3% while the uniformity of etching in the substrateprocessing apparatus of the comparative example is 8%. It can be seenfrom this experimental result that the uniformity of etching is improvedby supplying the chemical liquid onto the substrate 9 in the sealedspace 160 in which the inflow and the outflow of gas are blocked.

In the substrate processing apparatus 1 a, the inert gas supply part 186supplies the inert gas into the sealed space 160 while the outer gasexhaust part 194 exhausts the gas from the sealed space 160, to therebybring the sealed space 160 into the inert gas filled state. Then, theprocessing using the chemical liquid is performed in the inert gasfilled state (i.e., a low oxygen atmosphere). It is thereby possible toprevent deposition of particles on the substrate 9 and use a combustiblechemical liquid or the like.

The substrate processing apparatus 1 a further includes the top plate123 which becomes close to the upper surface 91 when the chemical liquidsupply part 183 supplies the chemical liquid onto the substrate 9, andthe upper nozzle 181 for supplying the chemical liquid from the chemicalliquid supply part 183 to between the top plate 123 and the uppersurface 91. It is thereby possible to achieve the supply of the chemicalliquid onto the upper surface 91 of the substrate 9 with the uppersurface 91 facing the narrow space between the upper surface 91 and thetop plate 123. As a result, it is possible to further suppress thevaporization of the chemical liquid and perform more uniform processingonto the upper surface 91 of the substrate 9. Further, since an outerperipheral edge of the top plate 123 is positioned outer than the outerperipheral edge of the substrate 9 in the radial direction all aroundthe circumference, the entire outer peripheral portion of the uppersurface 91 of the substrate 9 is covered with the top plate 123. As aresult, it is possible to suppress deposition of the processing liquidwhich is scattered from the outer peripheral edge of the substrate 9 andbounced off the inner wall of the chamber 12 and the like. Further, byperforming the processing in the state where the top plate 123 is closeto the substrate 9, it is possible to reduce the amount of chemicalliquid needed to cover the upper surface 91 of the substrate 9therewith.

Depending on the design of piping from the inert gas supply part 186 tothe sealed space 160 and piping from the sealed space 160 to the outergas exhaust part 194, even immediately after the supply of the inert gasinto the sealed space 160 by the inert gas supply part 186 and theexhaust of the gas from the sealed space 160 by the outer gas exhaustpart 194 are stopped, the gas sometimes flows in the sealed space 160for a short time. In such a case, as indicated by the thick broken linesL1 and L2 in FIG. 15, the supply of the inert gas into the sealed space160 by the inert gas supply part 186 and the exhaust of the gas from thesealed space 160 by the outer gas exhaust part 194 may be stopped before(e.g., 1 to 3 seconds before) the start of the supply of the chemicalliquid onto the substrate 9 at the time T2. With this operation, whenthe supply of the chemical liquid onto the substrate 9 is started, it ispossible to more reliably block the flow of the gas into/from the sealedspace 160. As a result, it is possible to perform more uniformprocessing on the upper surface 91 of the substrate 9.

In a preferable operation example of the substrate processing apparatus1 a, after the supply of the chemical liquid onto the substrate 9 inStep S23 of FIG. 14 is finished and before the supply of the deionizedwater onto the substrate 9 in Step S24 is started, i.e., between thetime T3 and the time T4 in FIG. 15, as indicated by the thick brokenline L3, the outer gas exhaust part 194 exhausts the gas from the sealedspace 160 (Step S23 a). It is thereby possible to suppress any effect onthe uniformity of the processing using the chemical liquid, which iscaused by mixture of the chemical liquid component in the atmosphereinto the deionized water serving as the rinse liquid. In this case, thegas is always exhausted from the internal space of the chamber 12 by theouter gas exhaust part 194 or the inner gas exhaust part 198 except whenthe chemical liquid is supplied onto the substrate 9.

The above-described substrate processing apparatus 1 a allows variousvariations. In the substrate processing apparatus 1 a of FIG. 10, thoughthe sealed space 160 is formed by the chamber 12 and the cup part 161when the chemical liquid is supplied and the sealed space 120 is formedonly by the chamber 12 when the deionized water is supplied, dependingon the design of the substrate processing apparatus, the cup part 161may be omitted and a sealed internal space may be formed only by thechamber 12 both when the chemical liquid is supplied and when thedeionized water is supplied. Thus, the sealed space forming part whichforms the sealed internal space can be achieved in various manners.

The chamber opening and closing mechanism 131 serving as the sealedspace opening and closing mechanism is not necessarily needed to movethe chamber cover 122 in the vertical direction, but may move thechamber body 121 in the vertical direction with the chamber cover 122fixed, to thereby switch the state of the chamber 12 among the openstate, the semiopen state, and a sealed state. Further, in the substrateprocessing apparatus in which the cup part 161 is omitted as describedabove, a loading port may be provided at a side portion of the chamberserving as the sealed space forming part. In this case, the sealed spaceopening and closing mechanism moves a movable part for closing theloading port with respect to the other portion, to thereby open andclose the chamber. Thus, in the substrate processing apparatus, inloading/unloading of the substrate 9, the sealed space opening andclosing mechanism moves the movable part which is a portion of thesealed space forming part with respect to the other portion, to therebyopen and close the sealed space forming part.

The substrate holding part 14 is not necessarily needed to be providedseparately as the substrate supporting part 141 and the substrateretaining part 142. For example, a plurality of holding structures eachhaving a recessed portion which is recessed outward in the radialdirection may be provided on the supporting part base 413. In this case,when the outer edge portion of the substrate 9 is inserted into therecessed portion of each holding structure, each holding structure comesinto contact with the substrate 9 from below, side, and above, tothereby hold the substrate 9.

In the substrate processing apparatus, various processings other thanthe above-described processings may be performed by supplying variousprocessing liquids (e.g., the SPM (sulfuric acid/hydrogen peroxidemixture) liquid) onto the substrate 9. Further, after the supply of thechemical liquid onto the substrate 9 is finished, a rinse liquid otherthan the deionized water may be supplied onto the upper surface 91 ofthe substrate 9.

Though the gas exhaust part is achieved by the outer gas exhaust part194 and the inner gas exhaust part 198, to exhaust gas from the internalspace in the sealed space forming part in the substrate processingapparatus 1 a, depending on the design of the substrate processingapparatus, only one gas exhaust part may be provided.

The substrate to be processed in the substrate processing apparatus isnot limited to a semiconductor substrate, but may be a glass substrateor other substrates.

The configurations of the above-described preferred embodiments andvariations may be appropriately combined as long as there are no mutualinconsistencies.

While the invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention. This application claims priority benefit under 35 U.S.C.Section 119 of Japanese Patent Application No. 2013-026224 filed in theJapan Patent Office on Feb. 14, 2013 and Japanese Patent Application No.2013-027387 filed in the Japan Patent Office on Feb. 15, 2013, theentire disclosures of which are incorporated herein by reference.

REFERENCE SIGNS LIST

-   -   1, 1 a Substrate processing apparatus    -   9 Substrate    -   10 Control part    -   12 Chamber    -   14 Substrate holding part    -   15 Substrate rotating mechanism    -   91 Upper surface    -   92 Lower surface    -   120, 160 Internal space    -   122 Chamber cover    -   123 Top plate    -   131 Chamber opening and closing mechanism    -   141 Substrate supporting part    -   161 Cup part    -   180 Gas ejection nozzle    -   181 Upper nozzle    -   182 Lower nozzle    -   183 Chemical liquid supply part    -   184 Deionized water supply part    -   186 Inert gas supply part    -   194 Outer gas exhaust part    -   198 Inner gas exhaust part    -   211 Lower surface facing part    -   211 a Facing surface    -   1802 Ejection port    -   J1 Central axis    -   S22 to S24, S23 a Step

The invention claimed is:
 1. A substrate processing apparatus forprocessing a substrate, comprising: an annular supporting part having anannular supporting part base around a central axis directed in avertical direction, for supporting an outer edge portion of a substratein a horizontal state from below; a lower surface facing part having afacing surface which faces an entire lower surface of said substrate insaid vertical direction inside said supporting part base; a rotatingmechanism including a motor for rotating said annular supporting parttogether with said substrate around said central axis relatively to saidlower surface facing part; a first processing liquid supply partconnected to a nozzle for supplying a first processing liquid onto anupper surface of said substrate; a second processing liquid supply partconnected to a processing liquid nozzle provided at said lower surfacefacing part, for supplying a second processing liquid onto a centerportion of said lower surface of said substrate from said processingliquid nozzle; and at least one gas ejection nozzle positioned away fromsaid central axis in said lower surface facing part, and protruding fromsaid facing surface, for ejecting heated gas toward said lower surfaceof said substrate, wherein said facing surface is a sloped surface whichgets farther away from said substrate as a distance from said centralaxis becomes larger, and said at least one gas ejection nozzle includesa gas ejection nozzle which is inclined with respect to said centralaxis so as to eject said heated gas toward an opposite side of saidcentral axis.
 2. The substrate processing apparatus according to claim1, wherein a distance between said at least one gas ejection nozzle andsaid lower surface of said substrate is not larger than 8 mm in adirection of said central axis.
 3. The substrate processing apparatusaccording to claim 2, wherein said at least one gas ejection nozzleincludes a plurality of gas ejection nozzles, and a distance between anejection port of one gas ejection nozzle out of said plurality of gasejection nozzles and said central axis is different from that between anejection port of another gas ejection nozzle and said central axis. 4.The substrate processing apparatus according to claim 1, wherein said atleast one gas ejection nozzle includes a plurality of gas ejectionnozzles, and a distance between an ejection port of one gas ejectionnozzle out of said plurality of gas ejection nozzles and said centralaxis is different from that between an ejection port of another gasejection nozzle and said central axis.
 5. The substrate processingapparatus according to claim 1, further comprising: a sealed spaceforming part including a chamber and forming an internal space which issealed, in which a processing on said substrate with said firstprocessing liquid and said second processing liquid is performed.
 6. Thesubstrate processing apparatus according to claim 5, wherein said atleast one gas ejection nozzle includes a plurality of gas ejectionnozzles, and a distance between an ejection port of one gas ejectionnozzle out of said plurality of gas ejection nozzles and said centralaxis is different from that between an ejection port of another gasejection nozzle and said central axis.
 7. The substrate processingapparatus according to claim 1, wherein a position of said lower surfacefacing part is fixed, and said rotating mechanism rotates said annularsupporting part around said central axis.
 8. The substrate processingapparatus according to claim 7, wherein said at least one gas ejectionnozzle includes a plurality of gas ejection nozzles, and a distancebetween an ejection port of one gas ejection nozzle out of saidplurality of gas ejection nozzles and said central axis is differentfrom that between an ejection port of another gas ejection nozzle andsaid central axis.